Real-time stability and profile comparison measurements between two different LTPs

Shinan Qian; Duan Jen Wang

doi:10.1117/12.618791

16 September 2005 Real-time stability and profile comparison measurements between two different LTPs

Shinan Qian, Duan Jen Wang

Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 59210K (2005) https://doi.org/10.1117/12.618791
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The Long Trace Profiler (LTP) is a precise angle measurement instrument, with a sensitivity and accuracy that can be in the sub-micron radian range. LTP characteristics depend on the particular LTP system schematic design, and the quality of components and assembly. The conditions of temperature, alignment, and mirror support during the measurement proccess vary between different laboratories, which influences significantly the test repeatability and accuracy. In this paper we introduce a direct comparison method to test the same object at the same point in the same environment at the same time by using two LTPs, which significantly increases the reliability of the comparison. A compact, portable LTP (PTLTP), which can be carried to different laboratories around the world, is used for comparison testing. Stability comparison experiments between the LTP II at the National Synchrotron Radiation Research Center (NSRRC), and the PTLTP of Brookhaven National Laboratory (BNL) reveal significant differences in performance between the instruments. The experiment is set up so that each optical head simultaneously records both its own sample probe beam and also the probe beam from the other optical head. The two probe beams are reflected from same point on the mirror. Tests show that the stability of the PTLTP with a monolithic beam splitter is 10 times better than the stability of the LTP II which has a separated beam splitter unit. A scheme for comparing scanning measurements of a mirror is introduced. Experimental results show a significant difference between the two LTPs due mainly to distortions in the optical components inside the optical head. A new scheme is proposed for further mirror comparison scanning tests.

Citation Download Citation

Shinan Qian and Duan Jen Wang "Real-time stability and profile comparison measurements between two different LTPs", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210K (16 September 2005); https://doi.org/10.1117/12.618791

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