VUV optical coatings for the next-generation micro-mechanical mirrors

Minghong Yang; Alexandre Gatto; Norbert Kaiser; Jan Uwe Schmidt; Thilo Sandner; Jörg Heber; Harald Schenk; Hubert Lakner

doi:10.1117/12.625138

5 October 2005 VUV optical coatings for the next-generation micro-mechanical mirrors

Minghong Yang, Alexandre Gatto, Norbert Kaiser, Jan Uwe Schmidt, Thilo Sandner, Jörg Heber, Harald Schenk, Hubert Lakner

Author Affiliations +

Proceedings Volume 5963, Advances in Optical Thin Films II; 596322 (2005) https://doi.org/10.1117/12.625138
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

This paper deals with vacuum UV optical coatings for micro mirrors applications. High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable for the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.

Citation Download Citation

Minghong Yang, Alexandre Gatto, Norbert Kaiser, Jan Uwe Schmidt, Thilo Sandner, Jörg Heber, Harald Schenk, and Hubert Lakner "VUV optical coatings for the next-generation micro-mechanical mirrors", Proc. SPIE 5963, Advances in Optical Thin Films II, 596322 (5 October 2005); https://doi.org/10.1117/12.625138

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