Multi-laser deposition technology for the nano-films of complex composition

Igor Peshko; Viktor Flis; Sergey Anokhov

doi:10.1117/12.628362

12 October 2005 Multi-laser deposition technology for the nano-films of complex composition

Igor Peshko, Viktor Flis, Sergey Anokhov

Proceedings Volume 5970, Photonic Applications in Devices and Communication Systems; 597010 (2005) https://doi.org/10.1117/12.628362
Event: Photonics North, 2005, Toronto, Canada

Abstract

A relatively cheap and compact deposition system, providing excellent high temperature superconducting films parameters, has been developed and studied. Y-Ba-Cu-O thin films were deposited routinely by the YAG double-laser system with the special optical beam and plasma plume shaping systems. Buffer CeO₂ layers were deposited by the laser system as well. The properties of the plasma plume generated by the laser beam with a specific intensity distribution were investigated. A correlation between the superconducting film properties and the thermal schedule of the deposition process, the geometry of the set-up, the laser beam intensity distribution, the plasma plume shape and oxygen pressure has been found. Under optimal conditions Al₂O₃ - CeO₂ - YBa₂Cu₃O_7-δ - structures have provided the maximum critical current density of close to 10⁷ A×cm^-2 at 77 K in zero magnetic field. The films were used for the ultra high-frequency filters for the telecommunication devices.

Citation Download Citation

Igor Peshko, Viktor Flis, and Sergey Anokhov "Multi-laser deposition technology for the nano-films of complex composition", Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 597010 (12 October 2005); https://doi.org/10.1117/12.628362

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