Pulsed laser cleaning of sub- and micron-size contaminant particles from optical surfaces: cleaning versus ablation and damage

Shishir Shukla; Sergey Kudryashov; Kevin Lyon; Susan D. Allen

doi:10.1117/12.638820

7 February 2006 Pulsed laser cleaning of sub- and micron-size contaminant particles from optical surfaces: cleaning versus ablation and damage

Shishir Shukla, Sergey Kudryashov, Kevin Lyon, Susan D. Allen

Author Affiliations +

Proceedings Volume 5991, Laser-Induced Damage in Optical Materials: 2005; 59910N (2006) https://doi.org/10.1117/12.638820
Event: Boulder Damage Symposium XXXVII: Annual Symposium on Optical Materials for High Power Lasers, 2005, Boulder, CO, United States

Abstract

Pulsed laser cleaning of sub- and micron-sized (0.3-10 μm) monodispersed model spherical polystyrene particles and fused silica particles from fused silica and glass optical surfaces was performed by means of ns TEA CO₂ laser. Efficient removal of these absorbing particles has been demonstrated in certain laser fluence range, which is below the threshold for ablative damage of the fused silica and glass substrate. Removal mechanisms of dry and steam laser cleaning of various critical optical surfaces are discussed.

Citation Download Citation

Shishir Shukla, Sergey Kudryashov, Kevin Lyon, and Susan D. Allen "Pulsed laser cleaning of sub- and micron-size contaminant particles from optical surfaces: cleaning versus ablation and damage", Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 59910N (7 February 2006); https://doi.org/10.1117/12.638820

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