A fast fourier transform algorithm for surface profiler based on scanning white-light interferometry

Wendong Zou; Nan Du; Yanjun Fu; Huirong Xiao; Qiang Du

doi:10.1117/12.667904

20 January 2006 A fast fourier transform algorithm for surface profiler based on scanning white-light interferometry

Wendong Zou, Nan Du, Yanjun Fu, Huirong Xiao, Qiang Du

Proceedings Volume 6027, ICO20: Optical Information Processing; 60270P (2006) https://doi.org/10.1117/12.667904
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

In this paper, we introduce a fast Fourier transform algorithm for three-dimension surface analysis in a scanning white-light interferometry system. The interferograms, one for each pixel of the interference image, representing the variation in intensity as a function of scan position, are transformed into the spatial frequency domain and the relative surface height information for each point is extracted from the complex phase as a function of frequency. For optimal speed and efficiency with a minimum of resources, a simple frequency-based discriminator is used in data acquisition to identify the modulation region and a circular buffer technique is adopted for retaining the complete interferogram efficiently. Applying this method to the mapping of the endface topography of fiber connector, we've achieved high measurement repeatability and speed.

Citation Download Citation

Wendong Zou, Nan Du, Yanjun Fu, Huirong Xiao, and Qiang Du "A fast fourier transform algorithm for surface profiler based on scanning white-light interferometry", Proc. SPIE 6027, ICO20: Optical Information Processing, 60270P (20 January 2006); https://doi.org/10.1117/12.667904

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