Optical and structural properties of ZnO films grown on Si(100) substrates by MOCVD

Wenjuan Shen; Yao Duan; Jun Wang; Qiyuan Wang; Yiping Zeng

doi:10.1117/12.667680

23 January 2006 Optical and structural properties of ZnO films grown on Si(100) substrates by MOCVD

Wenjuan Shen, Yao Duan, Jun Wang, Qiyuan Wang, Yiping Zeng

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290G (2006) https://doi.org/10.1117/12.667680
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

High quality ZnO films have been successfully grown on Si(100) substrates by Metal-organic chemical vapor deposition (MOCVD) technique. The optimization of growth conditions (II-VI ratio, growth temperature, etc) and the effects of film thickness and thermal treatment on ZnO films' crystal quality, surface morphology and optical properties were investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), and photoluminescence (PL) spectrum, respectively. The XRD patterns of the films grown at the optimized temperature (300°C) show only a sharp peak at about 34.4° corresponding to the (0002) peak of hexagonal ZnO, and the FWHM was lower than 0.4°. We find that under the optimized growth conditions, the increase of the ZnO films' thickness cannot improve their structural and optical properties. We suggest that if the film's thickness exceeds an optimum value, the crystal quality will be degraded due to the large differences of lattice constant and thermal expansion coefficient between Si and ZnO. In PL analysis, samples all displayed only ultraviolet emission peaks and no observable deep-level emission, which indicated high-quality ZnO films obtained. Thermal treatments were performed in oxygen and nitrogen atmosphere, respectively. Through the analysis of PL spectra, we found that ZnO films annealing in oxygen have the strongest intensity and the low FWHM of 10.44nm(106 meV) which is smaller than other reported values on ZnO films grown by MOCVD.

Citation Download Citation

Wenjuan Shen, Yao Duan, Jun Wang, Qiyuan Wang, and Yiping Zeng "Optical and structural properties of ZnO films grown on Si(100) substrates by MOCVD", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290G (23 January 2006); https://doi.org/10.1117/12.667680

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