Design and analysis of x-ray microscope of four mirrors working at grazing incidence

Jiasheng Hu; Lingling Zhao; Xiang Li

doi:10.1117/12.668106

1 February 2006 Design and analysis of x-ray microscope of four mirrors working at grazing incidence

Jiasheng Hu, Lingling Zhao, Xiang Li

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 60340M (2006) https://doi.org/10.1117/12.668106
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. But, Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by the materials, it is very difficult to image objects in the x ray region. Conventional imaging methods are hardly suitable to x-ray range. Generally, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper, non-coaxial grazing reflective imaging KB and KBA microscope systems are discussed in detail, and an x-ray microscope consisting of four mirrors working at grazing incidence is designed. It is an anastigmatic system, and the oblique angle of the image is evidently decreased. The resolution of 5-7 can be obtained within 2 field of view. And finally we also make analysis of the key problems that are met in the processing of manufacturing this system are analyzed.

Citation Download Citation

Jiasheng Hu, Lingling Zhao, and Xiang Li "Design and analysis of x-ray microscope of four mirrors working at grazing incidence", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 60340M (1 February 2006); https://doi.org/10.1117/12.668106

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