Paper
28 December 2005 Polymer microlens with independent control of radius and focal length for an imaging fiber
Author Affiliations +
Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 603709 (2005) https://doi.org/10.1117/12.639016
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia
Abstract
Fabrication of microlens array using polymer reflow is beginning to be a mainstream process, whether the polymer is directly used or whether the spherical profile is transferred by plasma etching to a glass substrate as, for example, in some handphone cameras. The focus so far has been on uniformity and obtaining lenses with equal radius and equal focal length. Actually it is easy to show using a phenomenological model that the focal length is depending on the lens radius, and not much on the contact angle, an effect that can be traced to the line tension force. For a biomedical application we need to terminate a 600um diameter imaging fiber with a group of lenses of different diameters - but with similar focal length. We have devised a microfabrication process on a silicon wafer to produce the lens with variable diameter and identical focal length, while etching the silicon wafer has helped us producing a sheath to insert the optical fiber and mount the lenses on the optical fiber.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mohammed Ashraf, Franck Chollet, Murukeshan Matham, and Chun Yang "Polymer microlens with independent control of radius and focal length for an imaging fiber", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 603709 (28 December 2005); https://doi.org/10.1117/12.639016
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Cited by 4 scholarly publications.
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KEYWORDS
Lenses

Microlens

Semiconducting wafers

Etching

Optical fibers

Silicon

Photoresist materials

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