One method to monitor the PPD function of Nikon scanners and some reticle surface particle detection machines

Wei-Han Yang; Ying-Ku Lin; C. C. Huang

doi:10.1117/12.653008

15 March 2006 One method to monitor the PPD function of Nikon scanners and some reticle surface particle detection machines

Wei-Han Yang, Ying-Ku Lin, C. C. Huang

Author Affiliations +

Proceedings Volume 6154, Optical Microlithography XIX; 61542H (2006) https://doi.org/10.1117/12.653008
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In the lithography process, if particles fall on the reticle, it will cause frame defocus, abnormal CD, bin fail ,and even low yield after exposure. This issue is more and more important in 90nm, 60nm, and 45nm processes.Nikon scanners have a pellicle particle detector (PPD) function that detects particles on the reticle surface before and after exposure. But how do you make sure the PPD function is working? And is the PPD sensitivity what you want? Until now, there has been no method to monitor this issue. Even Nikon and other mask shops could not provide a monitoring method.We offer an easy method that not only makes sure that the PPD function is working, but also monitors the sensitivity you want. The method is to make a monitor reticle by laying a hair on the reticle surface. If the position on the reticle with a hair triggers all alarms with C grade during PPD examination, we say this PPD function is ready because the width of the hair is about 75 um, and this is just the desired size.

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Wei-Han Yang, Ying-Ku Lin, and C. C. Huang "One method to monitor the PPD function of Nikon scanners and some reticle surface particle detection machines", Proc. SPIE 6154, Optical Microlithography XIX, 61542H (15 March 2006); https://doi.org/10.1117/12.653008

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