Paper
31 March 2006 Organic thin films based sensor applications
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Abstract
Organic semiconductors, such as pentacene, are particularly interesting because of its potential for various applications including thin film transistors (TFTs), electronic papers, radio frequency identification cards (RFIDs), and sensors. In this paper, we review recent progress in organic electronics with emphasis on their applications for sensing devices, and investigate the morphologies of pentacene films deposited on SiO2 and Si surfaces at different substrate temperatures. Scanning electron microcopy (SEM) micrographs from a nominally 50nm-thick pentacene film on SiO2 indicate that the grain sizes of pentacene film increase with an increase in substrate temperature. In addition, the grain size on clean silicon grown at a substrate temperature of 100 degrees C is markedly larger that on SiO2, ranging 10~20μm. Based on this morphological investigation on pentacene films, various types of organic sensors and devices with conjunction with interdigitated, gated and ungated structures are presented.
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Soyoun Jung, Taeksoo Ji, and Vijay K. Varadan "Organic thin films based sensor applications", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617209 (31 March 2006); https://doi.org/10.1117/12.668745
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KEYWORDS
Sensors

Silicon

Silicon films

Thin films

Organic semiconductors

Oxides

Dielectrics

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