Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer

Peter Lehmann

doi:10.1117/12.660892

28 April 2006 Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer

Peter Lehmann

Author Affiliations +

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 618811 (2006) https://doi.org/10.1117/12.660892
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Optical profiling based on vertically scanning white-light interferometry is a well established 3D measuring technique for more than one decade now. In recent years the area of application of these instruments tends more and more from laboratory to industrial applications, where robustness, compactness, and cost efficiency is required. A new instrument developed on the basis of a Mirau interferometer with a microscopic field of view meets important requirements of industrial use. Surface heights can be obtained with subnanometer resolution and the measuring setup is less sensitive to vibrations, so that roughness measurements on optical surfaces are possible even in a harsh environment. However, principal limitations arise in certain applications, e.g. if optically smooth surfaces with either flanks, curvatures, edges, or grooves are to be measured. This contribution deals with phenomena, which become relevant in these cases. The occuring effects lead to differences in the results of coherence peak and phase analysis of the interference signals, and therefore may be the origin of ghost steps in the measuring results.

Citation Download Citation

Peter Lehmann "Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618811 (28 April 2006); https://doi.org/10.1117/12.660892

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