Laser Processing Research For IC Manufacture

William C. Holton

doi:10.1117/12.961146

5 August 1986 Laser Processing Research For IC Manufacture

William C. Holton

Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961146
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Recent advances in the use of lasers for integrated circuit processing have developed effective techniques for cleaning, deposition, and etching of materials for both steered and large area projection to the degree that lasers are serious contenders to play an important role for in situ integrated circuit manufacturing.

Citation Download Citation

William C. Holton "Laser Processing Research For IC Manufacture", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961146

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