A new real-time surface profile measurement using a sinusoidal phase modulating interferometry

Guotian He; Xiangzhao Wang; Dailin Li; Jianmin Hu

doi:10.1117/12.725393

29 January 2007 A new real-time surface profile measurement using a sinusoidal phase modulating interferometry

Guotian He, Xiangzhao Wang, Dailin Li, Jianmin Hu

Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 62794J (2007) https://doi.org/10.1117/12.725393
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China

Abstract

In this paper, a sinusoidal phase modulating interferometer has been proposed to realize real-time surface profile measurement. And its operation principle has been analyzed theoretically. By analyzing the interference signal through the signal processing circuit, the displacement of each point on the surface can be obtained. The experimental results by using this interferometer to measure a glass plate show the maximum root-mean-square is 5.2nm, and the displacement resolution is up to 5x10^-3nm.This method proposed in this paper avoids the complex phase demodulation by computer, has high measurement accuracy, and can be used in the noise circumstance.

Citation Download Citation

Guotian He, Xiangzhao Wang, Dailin Li, and Jianmin Hu "A new real-time surface profile measurement using a sinusoidal phase modulating interferometry", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62794J (29 January 2007); https://doi.org/10.1117/12.725393

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KEYWORDS

Signal detection

Interferometers

Signal processing

Modulation

Phase interferometry

Glasses

Interferometry

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