An Analysis Of The Relevance To Linewidth Control Of Various Aerial Image Characteristics

Graeme D. Maxwell; Rene Vervoordeldonk

doi:10.1117/12.963724

20 August 1986 An Analysis Of The Relevance To Linewidth Control Of Various Aerial Image Characteristics

Graeme D. Maxwell, Rene Vervoordeldonk

Proceedings Volume 0633, Optical Microlithography V; (1986) https://doi.org/10.1117/12.963724
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

The results of a simulation study into various aerial image characteristics are presented, and these characteristics are shown to relate to features of the simulated developed resist profile. The results were obtained using the simulation program SPESA, and a related program VARYIM: - A novel method of presenting image characteristics over the full line/spacewidth domain will be introduced. - Relative intensity at the mask edge and lateral position of an intensity threshold are shown to be good indicators for developed feature size. - Intensity gradient at the mask edge is an indicator for lattitude with respect to dose, development and focus variations. - Image contrast and the maximum and minimum image intensities are not very useful as indicators either for developed feature size or process latitude.

Citation Download Citation

Graeme D. Maxwell and Rene Vervoordeldonk "An Analysis Of The Relevance To Linewidth Control Of Various Aerial Image Characteristics", Proc. SPIE 0633, Optical Microlithography V, (20 August 1986); https://doi.org/10.1117/12.963724

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available