Research on a novel MOEMS interferometric gyroscope

Huilan Liu; Lishuang Feng; Heng Lin; Chunxi Zhang

doi:10.1117/12.717807

28 October 2006 Research on a novel MOEMS interferometric gyroscope

Huilan Liu, Lishuang Feng, Heng Lin, Chunxi Zhang

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 63580W (2006) https://doi.org/10.1117/12.717807
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro-Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8 °/h.

Citation Download Citation

Huilan Liu, Lishuang Feng, Heng Lin, and Chunxi Zhang "Research on a novel MOEMS interferometric gyroscope", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 63580W (28 October 2006); https://doi.org/10.1117/12.717807

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KEYWORDS

Gyroscopes

Microopto electromechanical systems

Micromirrors

Interferometry

Free space optics

Optics manufacturing

Microelectromechanical systems

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