Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space

Kaoru Sato; Masashi Ohkawa; Seishi Sekine; Takashi Sato

doi:10.1117/12.685977

18 October 2006 Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space

Kaoru Sato, Masashi Ohkawa, Seishi Sekine, Takashi Sato

Author Affiliations +

Proceedings Volume 6379, Photonic Applications for Aerospace, Transportation, and Harsh Environments; 637908 (2006) https://doi.org/10.1117/12.685977
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

An original guided-wave optical pressure sensor, which has a semi-closed space with a small hole under a diaphragm, can be used even under high quasi-static pressure without sacrificing sensitivity, unlike conventional pressure sensors. Moreover, the sensor possesses characteristics of a high-pass filter, so that it responds to only the high-frequency components of pressure change. The cutoff frequency of the high-pass filter of the sensor property is a key factor in designing the sensor, and is acquired from the step response of the sensor. In a step-like change in ambient pressure, a pressure difference is induced on the diaphragm for a short while because the small hole restricts fluid flow between the semi-closed space and the surroundings. The reciprocal of the duration of the induced pressure difference corresponds to the cutoff frequency. In this study, the step response in relation to the cross-sectional area of the small hole was examined experimentally, and the measured durations were compared with the theoretical ones. In the experiment, the duration was approximately inversely proportional to the area of the small hole as theoretically predicted although the measured durations are larger by a factor of thousands than the calculated ones.

Citation Download Citation

Kaoru Sato, Masashi Ohkawa, Seishi Sekine, and Takashi Sato "Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space", Proc. SPIE 6379, Photonic Applications for Aerospace, Transportation, and Harsh Environments, 637908 (18 October 2006); https://doi.org/10.1117/12.685977

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