Surface acoustic wave devices

C. Müller; A. Nateprov; G. Obermeier; M. Klemm; V. Tsurkan; A. Wixforth; R. Tidecks; S. Horn

doi:10.1117/12.714700

20 February 2007 Surface acoustic wave devices

C. Müller, A. Nateprov, G. Obermeier, M. Klemm, V. Tsurkan, A. Wixforth, R. Tidecks, S. Horn

Proceedings Volume 6474, Zinc Oxide Materials and Devices II; 647415 (2007) https://doi.org/10.1117/12.714700
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g. LiNbO₃ and ZnO) will be reviewed. Then the application of surface acoustic waves in electronic devices will be presented. Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

Citation Download Citation

C. Müller, A. Nateprov, G. Obermeier, M. Klemm, V. Tsurkan, A. Wixforth, R. Tidecks, and S. Horn "Surface acoustic wave devices", Proc. SPIE 6474, Zinc Oxide Materials and Devices II, 647415 (20 February 2007); https://doi.org/10.1117/12.714700

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