Optical encoder measurement technology

Iuliana Iordache; Mihaela Bojan; D. Apostol; V. Damian; F. Garoi; P. C. Logofatu; Raluca Muller; B. Savu

doi:10.1117/12.741862

7 May 2007 Optical encoder measurement technology

Iuliana Iordache, Mihaela Bojan, D. Apostol, V. Damian, F. Garoi, P. C. Logofatu, Raluca Muller, B. Savu

Proceedings Volume 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III; 663506 (2007) https://doi.org/10.1117/12.741862
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 2006, Bucharest, Romania

Abstract

A new approach to metrology for the range below 100 nm is based on large fiducial grids optical encoders produced by interference / lithography. Since the encoder can only be as accurate as the grating scale, advance in this area depends on the availability of encoder plates of nanometer accuracy. Various commercially available or home made holographic gratings were checked using interferometric methods and compared with the AFM device results. The budget of errors was analyzed and the necessary improvements of measuring technology are presented.

Citation Download Citation

Iuliana Iordache, Mihaela Bojan, D. Apostol, V. Damian, F. Garoi, P. C. Logofatu, Raluca Muller, and B. Savu "Optical encoder measurement technology", Proc. SPIE 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 663506 (7 May 2007); https://doi.org/10.1117/12.741862

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