The Development Of Industrial Excimer Lasers

Jeffrey I Levatter

doi:10.1117/12.938923

12 November 1986 The Development Of Industrial Excimer Lasers

Jeffrey I Levatter

Proceedings Volume 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering; (1986) https://doi.org/10.1117/12.938923
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

The first discharge pumped excimer lasers introduced in the 1970's were derivatives of N₂ and C0₂ TEA lasers. They had spatially non-uniform outputs, relatively small output energies, low average powers, short operating lifetimes, and poor reliability. Today, more than a decade later, excimer lasers are just now maturing to the point where they are starting to enter the industrial workplace. This paper will review the transition from CO₂/N₂ to excimer technology, the engineering hurdles excimer lasers must overcome to make them viable industrial tools, and the current state of the "industrial excimer laser".

Citation Download Citation

Jeffrey I Levatter "The Development Of Industrial Excimer Lasers", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); https://doi.org/10.1117/12.938923

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