Metrology of micromirrors with replicated multilayers

L. Sveda; A. Inneman; V. Semencova; L. Pina; R. Hudec; R. Havlikova

doi:10.1117/12.733936

20 September 2007 Metrology of micromirrors with replicated multilayers

L. Sveda, A. Inneman, V. Semencova, L. Pina, R. Hudec, R. Havlikova

Proceedings Volume 6705, Advances in X-Ray/EUV Optics and Components II; 67050D (2007) https://doi.org/10.1117/12.733936
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Replicated multilayers inside the rotationally symmetric x-ray mirrors with diameter 0.5-4 mm are being investigated. While the replicated Micromirror technology as well as replicated multilayers on the planar surface were already studied, we present here the combination of both technologies. Initial simulations and development of metrology of multilayers inside small cavities are described, as well as very first results of experiments.

Citation Download Citation

L. Sveda, A. Inneman, V. Semencova, L. Pina, R. Hudec, and R. Havlikova "Metrology of micromirrors with replicated multilayers", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050D (20 September 2007); https://doi.org/10.1117/12.733936

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available