Extended lifetime of fluoride optics

Jue Wang; Colleen R. Clar; Horst Schreiber

doi:10.1117/12.753045

20 December 2007 Extended lifetime of fluoride optics

Jue Wang, Colleen R. Clar, Horst Schreiber

Proceedings Volume 6720, Laser-Induced Damage in Optical Materials: 2007; 67200I (2007) https://doi.org/10.1117/12.753045
Event: Boulder Damage Symposium XXXIX: Annual Symposium on Optical Materials for High Power Lasers, 2007, Boulder, Colorado, United States

Abstract

Surface and coating technology plays an important role for extending lifetime of fluoride optics for ArF excimer laser applications. Optically finished CaF₂ optics is characterized as top surface and subsurface by means of non-distractive quasi-Brewster angle technique. The subsurface is revealed by removing the top surface via distractive methods. Color centers on plasma ion and laser irradiated CaF₂ optics are discussed. The results suggest that fluorine depletion is associated with laser damage, dense smooth coatings enable one to extend the lifetime of CaF₂ optics.

Citation Download Citation

Jue Wang, Colleen R. Clar, and Horst Schreiber "Extended lifetime of fluoride optics", Proc. SPIE 6720, Laser-Induced Damage in Optical Materials: 2007, 67200I (20 December 2007); https://doi.org/10.1117/12.753045

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