Interferometric measurements of mid-spatial scale surface irregularities

Jiancheng Xu; Qiao Xu; Liqun Chai; Yan Deng

doi:10.1117/12.783513

17 January 2008 Interferometric measurements of mid-spatial scale surface irregularities

Jiancheng Xu, Qiao Xu, Liqun Chai, Yan Deng

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67233M (2008) https://doi.org/10.1117/12.783513
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A simple method which can be used to map mid-spatial scale surface irregularities with high signal noise ratio is described. Two major sources of errors are analyzed and removed. One is the contributions of small-scale irregularities of the reference surface, which are subtracted by shifting the test surface laterally by a distance. The other is the spurious response of CCD, which is removed by interpolation function. The presented method is verified by simulations and experiments. It shows that it can measure mid-spatial scale surface irregularities exactly and smaller scale surface irregularities can be obtained by making measurement for a series of the lateral shifting values corresponding to one-half of the pixel space on CCD.

Citation Download Citation

Jiancheng Xu, Qiao Xu, Liqun Chai, and Yan Deng "Interferometric measurements of mid-spatial scale surface irregularities", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233M (17 January 2008); https://doi.org/10.1117/12.783513

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