Mitigating polarization effects in on-die diffractive optics for a CMOS image sensor

Christopher Thomas; Richard Hornsey

doi:10.1117/12.765927

29 February 2008 Mitigating polarization effects in on-die diffractive optics for a CMOS image sensor

Christopher Thomas, Richard Hornsey

Proceedings Volume 6816, Sensors, Cameras, and Systems for Industrial/Scientific Applications IX; 68160Q (2008) https://doi.org/10.1117/12.765927
Event: Electronic Imaging, 2008, San Jose, California, United States

Abstract

On-die optics have been proposed for stand-alone image sensors. Previous works by the authors have proposed fabricating diffractive optical elements using the upper metal layers in a commercial CMOS process. This avoids the cost associated with process steps associated with microlens fabrication, but results in a point spread function that varies with the wavelength, angle, and polarization of incident light. Wavelength and angle sensitivities have been addressed by previous works. This paper models the effects of polarization on the point spread function of the imaging system, and proposes optical and algorithmic methods for compensating for these effects. The imaging behaviors of the resulting systems are evaluated. Simulations indicate that the uncorrected system can locate point sources to within +/-0.1 radian, and polarized point sources to within +/-0.05 radian along the axis of polarization. A system is described that uses a polarization-insensitive optical element and a deconvolution filter to achieve a corrected resolution pf +/-0.05 radian, with the ability to perform imaging of non-point sources with white light illumination.

Citation Download Citation

Christopher Thomas and Richard Hornsey "Mitigating polarization effects in on-die diffractive optics for a CMOS image sensor", Proc. SPIE 6816, Sensors, Cameras, and Systems for Industrial/Scientific Applications IX, 68160Q (29 February 2008); https://doi.org/10.1117/12.765927

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KEYWORDS

Point spread functions

Polarization

Zone plates

Modulation transfer functions

Optical components

Deconvolution

Imaging systems

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