Accurate vibration detection of a rough surface

Hualin Zeng; Yan Zhou; Songtao Fan; Jun He

doi:10.1117/12.757367

4 January 2008 Accurate vibration detection of a rough surface

Hualin Zeng, Yan Zhou, Songtao Fan, Jun He

Proceedings Volume 6831, Nanophotonics, Nanostructure, and Nanometrology II; 683118 (2008) https://doi.org/10.1117/12.757367
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.

Citation Download Citation

Hualin Zeng, Yan Zhou, Songtao Fan, and Jun He "Accurate vibration detection of a rough surface", Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683118 (4 January 2008); https://doi.org/10.1117/12.757367

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