Thermally stable multi-mode polymer optical waveguide fabricated by single-step photo-patterning of fluorinated polyimide/epoxy hybrids

Yuichi Urano; Ningjuan Chen; Kaichiro Nakano; Katsumi Maeda; Shinji Ando

doi:10.1117/12.760870

12 February 2008 Thermally stable multi-mode polymer optical waveguide fabricated by single-step photo-patterning of fluorinated polyimide/epoxy hybrids

Yuichi Urano, Ningjuan Chen, Kaichiro Nakano, Katsumi Maeda, Shinji Ando

Author Affiliations +

Proceedings Volume 6891, Organic Photonic Materials and Devices X; 68910P (2008) https://doi.org/10.1117/12.760870
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Novel polyimide (PI)/epoxy hybrid material for single-step photo-patterning of optical waveguides was prepared by blending of a semi-aromatic fluorinated poly(amic acid silylester) (PASE), a cycloaliphatic epoxy compound, and a photo-acid generator. A large refractive index change (δn, > 0.01), which is sufficient for multi-mode optical waveguides, was obtained between the polymer films prepared with and without UV irradiation. The refractive index change was generated by cationic reaction between the silylated carbonyl ester groups of PASE and epoxy rings, which was initiated by UV irradiation and promoted by successive thermal curing. The difference in molecular structures, which results in the refractive index changes, were characterized by FT-IR measurements, and it was clarified that the films with and without UV irradiation showed PASE and PI structures, respectively. These films exhibited high thermal stability higher than 230°C, which are desirable for waveguide fabrication for optical inter-connects and lightwave circuits. Using this hybrid material, channel-type optical waveguides were successfully fabricated by the single-step photo-patterning procedure without development by aqueous or organic solvents, which is more facile and economical for waveguide mass-fabrication.

Citation Download Citation

Yuichi Urano, Ningjuan Chen, Kaichiro Nakano, Katsumi Maeda, and Shinji Ando "Thermally stable multi-mode polymer optical waveguide fabricated by single-step photo-patterning of fluorinated polyimide/epoxy hybrids", Proc. SPIE 6891, Organic Photonic Materials and Devices X, 68910P (12 February 2008); https://doi.org/10.1117/12.760870

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available