Shack-Hartmann wavefront sensor for the determination of local inhomogeneities of the surface

Andrey A. Goloborodko; Vitalij N. Kurashov; Dmytro V. Podanchuk; Natalia S. Sutyagina

doi:10.1117/12.797117

22 April 2008 Shack-Hartmann wavefront sensor for the determination of local inhomogeneities of the surface

Andrey A. Goloborodko, Vitalij N. Kurashov, Dmytro V. Podanchuk, Natalia S. Sutyagina

Proceedings Volume 7008, Eighth International Conference on Correlation Optics; 70081S (2008) https://doi.org/10.1117/12.797117
Event: Eighth International Conference on Correlation Optics, 2007, Chernivsti, Ukraine

Abstract

The modification of the wavefront registration scheme for the purpose of the sensor spatial resolution improvement is considered. It's proposed to use the focused laser beam for illumination of the separate area of the surface, which after the optical transformation in Fourier optics scheme forms the signal in the sensors plane that is proportional to the spectrum of the spatial frequencies of the surface shape. At the same time the spatial resolution in the surface plane is determined by the sensor aperture, but not the spatial resolution of its lenslet array. The theoretical analysis and computer simulation of the wavefront sensor work for the local inhomogeneities determination of thereflective surface is realized. For obtaining the submicron spatial resolution of the sensor it is proposed to classify the surface micro areas by the multidimensional statistical analysis methods.

Citation Download Citation

Andrey A. Goloborodko, Vitalij N. Kurashov, Dmytro V. Podanchuk, and Natalia S. Sutyagina "Shack-Hartmann wavefront sensor for the determination of local inhomogeneities of the surface", Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 70081S (22 April 2008); https://doi.org/10.1117/12.797117

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