Paper
2 September 2008 Metrologically speaking
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Abstract
Optical metrology is a science and an art. Education in the engineering disciplines concentrates on technical knowledge transfer. However, creativity and imagination are required in partnership with these technical skills to generate truly innovative results. This presentation investigates strategies and methodologies of working in which the exploration of potential solutions to optical metrology problems becomes more of a creative process than the strict application of technical know-how.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew E. Hansen "Metrologically speaking", Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 70680K (2 September 2008); https://doi.org/10.1117/12.797166
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KEYWORDS
Metrology

Mirrors

Monochromatic aberrations

Lithography

Optical metrology

Reticles

Semiconducting wafers

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