Research on a novel high sensitivity MOEMS deformable nano-grating accelerometer

Bo Zhang; Zhikai Fan; Lishuang Feng; Qunyan Zhang

doi:10.1117/12.806718

13 October 2008 Research on a novel high sensitivity MOEMS deformable nano-grating accelerometer

Bo Zhang, Zhikai Fan, Lishuang Feng, Qunyan Zhang

Proceedings Volume 7128, Seventh International Symposium on Instrumentation and Control Technology: Measurement Theory and Systems and Aeronautical Equipment; 71281I (2008) https://doi.org/10.1117/12.806718
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

With the development of the military field, there is growing interest in extremely high sensitivity. For meeting this desire, we design a novel high sensitivity MOEMS (Micro-Opto-Electro-Mechanical-System) accelerometer which is based on laterally deformable nano-grating. Calculations predict that this sensitivity could be improved by up to two orders of magnitude in future design and it can reach as high as 10-9g. These sensors consist of two offset layers of sub-wavelength polysilicon nano-gratings. They modulate the near-field intensity and polarization of an incident light source in response to relative motion of the nano-gratings. The reflected/transmitted optical beam intensity from the nano-gratings is measured as a function of the relative lateral positions of the nano-gratings. By using rigorous coupled-wave analysis (RCWA) and Fourier transform methods, we research the theory mechanism about nano-grating accelerometer. The accelerometer belongs to displacement sensors. For small changes in the spacing of the grating elements, a large change in the optical reflection and transmission amplitude observed. An in-plane motion detection sensitivity of 160fm/√HZ has been measured, and its displacement sensitivities will be as low as 12fm/mg. This sensitivity compares favorably to that of any other MEMS (Micro-Electro-Mechanical-System) transducer.

Citation Download Citation

Bo Zhang, Zhikai Fan, Lishuang Feng, and Qunyan Zhang "Research on a novel high sensitivity MOEMS deformable nano-grating accelerometer", Proc. SPIE 7128, Seventh International Symposium on Instrumentation and Control Technology: Measurement Theory and Systems and Aeronautical Equipment, 71281I (13 October 2008); https://doi.org/10.1117/12.806718

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KEYWORDS

Diffraction gratings

Microopto electromechanical systems

Diffraction

Near field optics

Sensors

Binary data

Light sources

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