Improvement of lateral resolution property of differential confocal system using radial birefringent pupil filter

Li Min Zou; Xi Li; Hong Ji Zhang; Xue Mei Ding

doi:10.1117/12.821250

12 January 2009 Improvement of lateral resolution property of differential confocal system using radial birefringent pupil filter

Li Min Zou, Xi Li, Hong Ji Zhang, Xue Mei Ding

Author Affiliations +

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71333O (2009) https://doi.org/10.1117/12.821250
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

Lateral resolution, as one of the most important parameters of a confocal system, has a direct effect on the measurement accuracy of a confocal system. The lateral resolution of a confocal system can be improved by introducing a radial birefringent pupil filter into a differential confocal system. The pupil function of this radial birefringent pupil filter can be obtained using Jones algorithm and, the angle between the polarization direction of the polarizing film of the lateral birefringent filter and the optical axis of the birefringent element, and the size of a filter a, can be got by analyzing the first zero point G. Meanwhile, we analyzed the influence of such factors as the defocusing amount on the lateral response of the system. It was proved through simulation and experiments that the lateral resolution of a confocal system can be improved using an optimized radial birefringent pupil filter.

Citation Download Citation

Li Min Zou, Xi Li, Hong Ji Zhang, and Xue Mei Ding "Improvement of lateral resolution property of differential confocal system using radial birefringent pupil filter", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333O (12 January 2009); https://doi.org/10.1117/12.821250

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