Surface observation and measurement by means of digital holographic microscope with arbitrary degree of coherence

Luděk Lovicar; Lukáš Kvasnica; Radim Chmelík

doi:10.1117/12.822410

20 November 2008 Surface observation and measurement by means of digital holographic microscope with arbitrary degree of coherence

Luděk Lovicar, Lukáš Kvasnica, Radim Chmelík

Author Affiliations +

Proceedings Volume 7141, 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 71411S (2008) https://doi.org/10.1117/12.822410
Event: 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2008, Polanica Zdroj, Poland

Abstract

The application of digital holographic microscope (DHM) imaging and inspection of fine surface structures, dimensions of which are in the range from units of nanometers up to units of micrometers in optical axis direction, is described in this paper. Accurate results of surface structures measurement, in the case the surface profile height is of three orders range, is achieved by simultaneous processing of optically sectioned image intensity and image phase. Surface profile height is roughly specified by the image intensity and the precise height information is acquired from the image phase. Full width at half maximum of the axial intensity response is adjusted properly for particular specimen by the modification of the spectral function of illumination and by resizing of the incoherent illumination source. It means the intervention into spatial and temporal coherence of the illumination. The content of this paper is the description of imaging characteristics of the DHM for individual illumination modes together with experimental results.

Citation Download Citation

Luděk Lovicar, Lukáš Kvasnica, and Radim Chmelík "Surface observation and measurement by means of digital holographic microscope with arbitrary degree of coherence", Proc. SPIE 7141, 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 71411S (20 November 2008); https://doi.org/10.1117/12.822410

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