Parallel femtosecond laser processing with a computer-generated hologram

S. Hasegawa; Y. Hayasaki

doi:10.1117/12.810234

24 February 2009 Parallel femtosecond laser processing with a computer-generated hologram

S. Hasegawa, Y. Hayasaki

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72011D (2009) https://doi.org/10.1117/12.810234
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Femtosecond laser processing acquires futures of high throughput and high light-use efficiency by using a computer-generated hologram. In the holographic femtosecond laser processing, a precise control of diffraction peaks is indispensable to fabricate enormous numbers of nanometer-scale structures simultaneously. The computer-optimized hologram has high uniformity of the diffraction peaks in the computer reconstruction. However, the uniformity decreases due to spatial and temporal properties of the optical system. We propose some optimization methods of the hologram to improve the uniformity and demonstrate the processing performance.

Citation Download Citation

S. Hasegawa and Y. Hayasaki "Parallel femtosecond laser processing with a computer-generated hologram", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72011D (24 February 2009); https://doi.org/10.1117/12.810234

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