Paper
22 January 1987 Heterodyne Holographic Interferometry For High Resolution 3-D Sensing
James W. Wagner
Author Affiliations +
Proceedings Volume 0728, Optics, Illumination, and Image Sensing for Machine Vision; (1987) https://doi.org/10.1117/12.937837
Event: Cambridge Symposium_Intelligent Robotics Systems, 1986, Cambridge, MA, United States
Abstract
Heterodyne and "quasi"-heterodyne techniques applied to holographic interferometry provide both increased sensitivity and means for automated analysis of fringe information. Holograms may be recorded which contain optical path difference information related to surface contour, displacement, or deformation of an object of interest. Optical path difference resolution approaching 1/2000 of a wavelength (about 2.5 Angstroms) has been demonstrated using heterodyning techniques in which image data is electronically reduced to produce high resolution maps of contours or deformation of objects with specular or diffuse reflecting surfaces. This represents a 1000-fold improvement in sensitivity over that acheived using conventional holographic interferometry. The fact that dimensional data is taken directly from the image plane of the interferometer unambiguously and without the need for human interpretation, suggests the potential for the use of these or similar techniques for some machine vision applications.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James W. Wagner "Heterodyne Holographic Interferometry For High Resolution 3-D Sensing", Proc. SPIE 0728, Optics, Illumination, and Image Sensing for Machine Vision, (22 January 1987); https://doi.org/10.1117/12.937837
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Cited by 2 scholarly publications.
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KEYWORDS
Holographic interferometry

Mirrors

Heterodyning

Interferometry

Wavefronts

Holography

Holograms

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