Paper
21 May 2009 Study on test metrology of large aperture optical system wavefront
Zhiying Liu, Yuegang Fu, Tianyuan Gao, Zhijian Wang
Author Affiliations +
Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72823L (2009) https://doi.org/10.1117/12.831042
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China
Abstract
Large aperture optical system test has been a key problem for a long time. It could be solved by sub-aperture stitching method after the sub-apertures are tested. Sub-aperture stitching technology is a feasible method for testing large diameter optical system with small diameter interferometer sub-aperture stitching. Auto-collimating component will be needed with interferometer stitching method. Auto-collimating component is defined that the image could be kept stable when the optical component rotates about any axis in space. And the beam could be back along original optical path. By this means, auto collimation could be realized. The auto-collimating component is smaller than the test system. The whole wavefront of large aperture system could be tested through the method that the auto-collimating component moves along the guide rail and rotates about optical axis. A right angle roof prism is chosen as the auto-collimating component due to its character of easier manufacture. The active matrix, characteristic orientation and extreme axial is deduced with dynamic optics. The sub-aperture stitching testing process is simulated by ZEMAX in detail. The test result by stitching method is compared with that by directive test method for large aperture optical system. It is shown that the relative test error is less than 4.3λ 0/00. The sub -aperture stitching test method is verified.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiying Liu, Yuegang Fu, Tianyuan Gao, and Zhijian Wang "Study on test metrology of large aperture optical system wavefront", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72823L (21 May 2009); https://doi.org/10.1117/12.831042
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KEYWORDS
Wavefronts

Optical testing

Interferometers

Optics manufacturing

Metrology

Optical components

Prisms

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