Aspheric mirror measurement based on fringe reflection

Xianyu Su; Yan Tang; Yuankun Liu; Qican Zhang; Liqun Xiang

doi:10.1117/12.828659

20 May 2009 Aspheric mirror measurement based on fringe reflection

Xianyu Su, Yan Tang, Yuankun Liu, Qican Zhang, Liqun Xiang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831B (2009) https://doi.org/10.1117/12.828659
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The aspheric mirror can correct aberrations and improve imaging quality of optical system . M oreover using such mirror can reduce the num ber of optical elem ents in an optical system and further reduce the weight and size of the system . In order to improve the accuracy of aspheric mirror fabrication, there are many methods used to m easure aspheric mirror. Am ong these methods, the most popular one is interferom etry which can m easure the surface with very high accuracy. However, interferom etry commonly requires com plicated and expensive assistant optics, and its m easurem ent range is limited. In order to measure aspheric mirror conveniently and effectively, we further evolve the well know n approaches of 'Phase M easuring Deflectom ety'(PM D) to measure such surface. In this study, we present a novel m ethod based on fringe reflection to m easure aspheric m irror. In the m easurem ent process, the screen and the cam era are m oved along the mirror optical axis, respectively. Using the phase information of the recording fringe patterns, for each cam era pixel, we can calculate the slope and coordinate of its corresponding point on the surface to be tested. By integrating, the absolute height of the tested surface can be reconstructed. Com pared with traditional PM D, this m ethod can m easure the absolute height of an aspheric m irror unam biguously and doesn't need com plex calibration.

Citation Download Citation

Xianyu Su, Yan Tang, Yuankun Liu, Qican Zhang, and Liqun Xiang "Aspheric mirror measurement based on fringe reflection", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831B (20 May 2009); https://doi.org/10.1117/12.828659

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