Common-path two-wavelength interferometer with submicron precision for profile measurements in online applications

José M. Enguita; Ignacio Álvarez; María Frade; Jorge Marina

doi:10.1117/12.827502

17 June 2009 Common-path two-wavelength interferometer with submicron precision for profile measurements in online applications

José M. Enguita, Ignacio Álvarez, María Frade, Jorge Marina

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73890W (2009) https://doi.org/10.1117/12.827502
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We propose a common-path two-wavelength intereferometric system based on a single optical element, a Savart Plate, able to obtain profile measurements at frame rate. To improve precision up to the sub-micron levels from safe working distances (beyond 100 mm), we use a speckle reduction system based on a rotating holographic diffuser. The interferometric signals of the two wavelengths are obtained simultaneously and their phase signals are combined to extend the measurement range. The system's common-path interferometry nature, and the possibility of acquiring a distance profile in a single frame, make it ideal for surface inspection in industrial environments.

Citation Download Citation

José M. Enguita, Ignacio Álvarez, María Frade, and Jorge Marina "Common-path two-wavelength interferometer with submicron precision for profile measurements in online applications", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890W (17 June 2009); https://doi.org/10.1117/12.827502

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