In-situ position and vibration measurement of rough surfaces using laser Doppler distance sensors

J. Czarske; T. Pfister; P. Günther; L. Büttner

doi:10.1117/12.828396

17 June 2009 In-situ position and vibration measurement of rough surfaces using laser Doppler distance sensors

J. Czarske, T. Pfister, P. Günther, L. Büttner

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73891Q (2009) https://doi.org/10.1117/12.828396
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

In-situ measurement of distances and shapes as well as dynamic deformations and vibrations of fast moving and especially rotating objects, such as gear shafts and turbine blades, is an important task at process control. We recently developed a laser Doppler distance frequency sensor, employing two superposed fan-shaped interference fringe systems with contrary fringe spacing gradients. Via two Doppler frequency evaluations the non-incremental position (i.e. distance) and the tangential velocity of rotating bodies are determined simultaneously. The distance uncertainty is in contrast to e.g. triangulation in principle independent of the object velocity. This unique feature allows micrometer resolutions of fast moved rough surfaces. The novel sensor was applied at turbo machines in order to control the tip clearance. The measurements at a transonic centrifugal compressor were performed during operation at up to 50,000 rpm, i.e. 586 m/s velocity of the blade tips. Due to the operational conditions such as temperatures of up to 300 °C, a flexible and robust measurement system with a passive fiber-coupled sensor, using diffractive optics, has been realized. Since the tip clearance of individual blades could be temporally resolved an analysis of blade vibrations was possible. A Fourier transformation of the blade distances results in an average period of 3 revolutions corresponding to a frequency of 1/3 of the rotary frequency. Additionally, a laser Doppler distance sensor using two tilted fringe systems and phase evaluation will be presented. This phase sensor exhibits a minimum position resolution of σ_z = 140 nm. It allows precise in-situ shape measurements at grinding and turning processes.

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J. Czarske, T. Pfister, P. Günther, and L. Büttner "In-situ position and vibration measurement of rough surfaces using laser Doppler distance sensors", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891Q (17 June 2009); https://doi.org/10.1117/12.828396

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KEYWORDS

Sensors

Doppler effect

Distance measurement

Temperature metrology

Vibrometry

Calibration

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