Dimensional Profiling By Electronic Phase Measurement

R. Thalmann; R. Dandliker

doi:10.1117/12.939765

10 September 1987 Dimensional Profiling By Electronic Phase Measurement

R. Thalmann, R. Dandliker

Proceedings Volume 0746, Industrial Laser Interferometry; (1987) https://doi.org/10.1117/12.939765
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

The application of electronic phase measurement techniques (heterodyne and quasi-heterodyne fringe interpolation) to dimensional profiling of 3-D objects is discussed. The contour fringes are generated by interference of two illumination sources or by two-wavelength holography. The use of a micro-computer for automated data acquisition and processing allows to determine the object shape for a large number of points and for arbitrarily shaped contour fringe surfaces. Experimental results are reported with both, heterodyne and quasi-heterodyne phase measurement, offering a typical accuracy for object depth measurement of 0.2% of the lateral extension of the object.

Citation Download Citation

R. Thalmann and R. Dandliker "Dimensional Profiling By Electronic Phase Measurement", Proc. SPIE 0746, Industrial Laser Interferometry, (10 September 1987); https://doi.org/10.1117/12.939765

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