Mechanical characterization of zinc oxide thin films on glass substrates by nanoindentation

Yichong Cheng; Zhan-Sheng Guo

doi:10.1117/12.837438

20 October 2009 Mechanical characterization of zinc oxide thin films on glass substrates by nanoindentation

Yichong Cheng, Zhan-Sheng Guo

Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 749309 (2009) https://doi.org/10.1117/12.837438
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

Microstructures and mechanical properties of zinc oxide (ZnO) thin films deposited onto glass substrates by rf magnetron sputtering were studied. Surface morphologies and crystalline structural characteristics were examined using atomic force microscopy (AFM) and X-ray diffraction (XRD), respectively. Mechanical properties were measured by nanoindentation. The crystalline structures of ZnO thin films were well ordered with high c-axis (002) orientations. The surface morphologies of ZnO thin films were smooth and grains grew and distributed uniformly. A single pop-in in the load-displacement curve was clearly observed at a specific depth (7-10nm) of the thin film. The hardness and Young's modulus of ZnO thin films were ranged from 8.2 to 10.4GPa and 105 to 120GPa, respectively.

Citation Download Citation

Yichong Cheng and Zhan-Sheng Guo "Mechanical characterization of zinc oxide thin films on glass substrates by nanoindentation", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749309 (20 October 2009); https://doi.org/10.1117/12.837438

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