High reflectance mirrors, using fluoride coating materials, have been irradiated for extended time periods by a 193 nm
kilohertz repetitive laser source. This irradiation promoted a spectral shift in the reflectance band towards shorter
wavelength. In efforts to determine the mechanism for the observed spectral shifts, various models were investigated by
employing such techniques as: spectrophotometry, surface profile interferometry, coating design simulation and x-ray
diffraction. The result of the investigation indicates that layers near the top surface of the coating structure underwent
densification which resulted in the observed spectral shift.
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