Investigations on titanium oxide film as an alternative heat sensitive material

Jing Jiang; Zhiming Wu; Yadong Jiang; Tao Wang; He Yu

doi:10.1117/12.837590

24 November 2009 Investigations on titanium oxide film as an alternative heat sensitive material

Jing Jiang, Zhiming Wu, Yadong Jiang, Tao Wang, He Yu

Proceedings Volume 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology; 751315 (2009) https://doi.org/10.1117/12.837590
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

In this article, substoichiometric titanium oxide thin films (TiOX) are prepared with the reactive DC sputtering in an oxygen and argon atmosphere and then annealed in an oxygen atmosphere. Under a set of optimum deposition parameters, TiO_X film with sheet resistance value of 167.9 KΩ/(box) and TCR value of -3.30%/K obtained. Transmittance of the optimum film is obtained in the 300≤λ≤1100nm wavelength range at room temperature. Thickness, near-infrared absorptance, and other properties of the optimum film are also investigated in this paper.

Citation Download Citation

Jing Jiang, Zhiming Wu, Yadong Jiang, Tao Wang, and He Yu "Investigations on titanium oxide film as an alternative heat sensitive material", Proc. SPIE 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology, 751315 (24 November 2009); https://doi.org/10.1117/12.837590

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