Study on microchannel fabrication technology by femtosecond laser micromachining in transparent materials

Rongrong Xu; Deming Liu; Guohua Liu; Feng Cao

doi:10.1117/12.843479

21 October 2009 Study on microchannel fabrication technology by femtosecond laser micromachining in transparent materials

Rongrong Xu, Deming Liu, Guohua Liu, Feng Cao

Author Affiliations +

Proceedings Volume 7515, Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications; 75150M (2009) https://doi.org/10.1117/12.843479
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

Microchannels are fabricated into transparent materials usually have two different methods, the first method is using tight focused femtosecond laser processing and chemical etching, and in the other method, many laser-produced voids are linked together to form a hollow channel, whereas both methods of channel fabrication is relatively slow, a novel method of parallel processing channels have been demonstrated based on the self-focusing formation theory. In addition, It provides a theoretical basis for the further study on the microchannel fabricating of femtosecond laser.

Citation Download Citation

Rongrong Xu, Deming Liu, Guohua Liu, and Feng Cao "Study on microchannel fabrication technology by femtosecond laser micromachining in transparent materials", Proc. SPIE 7515, Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications, 75150M (21 October 2009); https://doi.org/10.1117/12.843479

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