Polarization phase-shifting interference microscopy for ultra-precision surface topography

W. Cheng; X. Chen; L. Zhou; X. Liu

doi:10.1117/12.885971

28 December 2010 Polarization phase-shifting interference microscopy for ultra-precision surface topography

W. Cheng, X. Chen, L. Zhou, X. Liu

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75442H (2010) https://doi.org/10.1117/12.885971
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Phase-shifting interference microscopy is a very important technique for precision surface topography measurement. In this paper, polarization phase-shifting interference microscopy is proposed for ultra-precision surface topography measurement. The principle of the microscopy is described and analyzed in details, a system based on the principle is constructed, and series of experimental testing are conducted on the system. The experimental results show that the measurement accuracy is better than 1.5nm, and high accuracy is verified.

Citation Download Citation

W. Cheng, X. Chen, L. Zhou, and X. Liu "Polarization phase-shifting interference microscopy for ultra-precision surface topography", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442H (28 December 2010); https://doi.org/10.1117/12.885971

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KEYWORDS

Phase shifts

Microscopy

Polarization

Phase shifting

Polarizers

Beam splitters

Precision measurement

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