Performance comparison of optical path difference calculation algorithms for wavelength scanning interferometry

Kai Wei Wang; CaoYan Long

doi:10.1117/12.867761

11 October 2010 Performance comparison of optical path difference calculation algorithms for wavelength scanning interferometry

Kai Wei Wang, CaoYan Long

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560V (2010) https://doi.org/10.1117/12.867761
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Frequency-scanning interferometry is a very useful absolute distance and areal surface profile measurement technique as it generates absolute optical path difference without any mechanical scanning. It is thus critical to select an appropriate algorithm to precisely and rapidly acquire the phase with respect of the wavenumber and optical path difference of the interference fringe. In this paper we analyze and demonstrate in detail the processing speed and accuracy of current optical path difference calculation algorithms. It is pointed out that the algorithm based on Fourier transform - inverse Fourier transform has the highest performance in terms of calculation time and overall noise insensitivity, while the phase shifting algorithm has the highest calculation accuracy when noise level is low.

Citation Download Citation

Kai Wei Wang and CaoYan Long "Performance comparison of optical path difference calculation algorithms for wavelength scanning interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560V (11 October 2010); https://doi.org/10.1117/12.867761

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