MEMS deformable mirrors for astronomical adaptive optics

S. A. Cornelissen; A. L. Hartzell; J. B. Stewart; T. G. Bifano; P. A. Bierden

doi:10.1117/12.857296

28 July 2010 MEMS deformable mirrors for astronomical adaptive optics

S. A. Cornelissen, A. L. Hartzell, J. B. Stewart, T. G. Bifano, P. A. Bierden

Proceedings Volume 7736, Adaptive Optics Systems II; 77362D (2010) https://doi.org/10.1117/12.857296
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imaging systems and for compensation of atmospheric turbulence in free-space laser communication. These light-weight, low power deformable mirrors have an active aperture of up to 25.2mm consisting of a thin silicon membrane mirror supported by an array of 140 to 4092 electrostatic actuators which exhibit no hysteresis and have sub-nanometer repeatability making them well suited for open-loop control applications such as Multi-Object Adaptive Optics (MOAO). The continuous membrane deformable mirrors, coated with a highly reflective metal film, are capable of up to 6μm of stroke, have a surface finish of <10nm RMS with a fill factor of 99.8%. Presented in this paper are device characteristics and performance test results, as well as reliability test data and device lifetime predictions that show that trillions of actuator cycles can be achieved without failures.

Citation Download Citation

S. A. Cornelissen, A. L. Hartzell, J. B. Stewart, T. G. Bifano, and P. A. Bierden "MEMS deformable mirrors for astronomical adaptive optics", Proc. SPIE 7736, Adaptive Optics Systems II, 77362D (28 July 2010); https://doi.org/10.1117/12.857296

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available