The regular lattice of optical vortices used for measurement in two angular and one linear degree of freedom

Ewa Fraczek; Filip Rus; Janusz Mroczka

doi:10.1117/12.881752

14 December 2010 The regular lattice of optical vortices used for measurement in two angular and one linear degree of freedom

Ewa Fraczek, Filip Rus, Janusz Mroczka

Author Affiliations +

Proceedings Volume 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 77460A (2010) https://doi.org/10.1117/12.881752
Event: 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2010, Liptovsky Jan, Slovakia

Abstract

In this paper authors present the method for measurement of micro displacements along optical axis of the reflective object. Three separate focused beams are used in those measurements. Those three plane waves are reflected by examined object surface and their interference tends to create regular lattice of the optical vortices. In this paper authors present test results of sensitivity of an actual measurement system.

Citation Download Citation

Ewa Fraczek, Filip Rus, and Janusz Mroczka "The regular lattice of optical vortices used for measurement in two angular and one linear degree of freedom", Proc. SPIE 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 77460A (14 December 2010); https://doi.org/10.1117/12.881752

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