1100°C fiber-optic high-temperature Fabry-Perot sensors fabricated by laser-micromachining

Zengling Ran; Yong Chen; Yunjiang Rao; Dong Sun; En Lu; Zhiwei Liu

doi:10.1117/12.884921

17 May 2011 1100°C fiber-optic high-temperature Fabry-Perot sensors fabricated by laser-micromachining

Zengling Ran, Yong Chen, Yunjiang Rao, Dong Sun, En Lu, Zhiwei Liu

Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775317 (2011) https://doi.org/10.1117/12.884921
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada

Abstract

Two laser-machined high-sensitivity fiber-optic Fabry-Perot (F-P) high temperature sensors based on sapphire and silica fibers are fabricated by laser-micromachining and demonstrated in this paper, respectively. The temperature characteristics of the sapphire and silica fiber sensor are investigated over a temperature range from 100°C to 1100°C. Experiment result shows that the sapphire F-P sensor has a temperature sensitivity of ~50 pm/°C with a linearity of 0.999, which is 5 times higher than that of the silica F-P sensor.

Citation Download Citation

Zengling Ran, Yong Chen, Yunjiang Rao, Dong Sun, En Lu, and Zhiwei Liu "1100°C fiber-optic high-temperature Fabry-Perot sensors fabricated by laser-micromachining", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775317 (17 May 2011); https://doi.org/10.1117/12.884921

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