Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Ping Zhou; James Burge; Chunyu Zhao

doi:10.1117/12.862427

2 August 2010 Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Ping Zhou, James Burge, Chunyu Zhao

Proceedings Volume 7790, Interferometry XV: Techniques and Analysis; 77900L (2010) https://doi.org/10.1117/12.862427
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

Citation Download Citation

Ping Zhou, James Burge, and Chunyu Zhao "Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900L (2 August 2010); https://doi.org/10.1117/12.862427

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