Surface profile measurement of KB mirrors using Fizeau laser interferometer

J. Qian; L. Assoufid; C. Liu; B. Shi; W. Liu

doi:10.1117/12.860760

27 August 2010 Surface profile measurement of KB mirrors using Fizeau laser interferometer

J. Qian, L. Assoufid, C. Liu, B. Shi, W. Liu

Proceedings Volume 7801, Advances in Metrology for X-Ray and EUV Optics III; 78010K (2010) https://doi.org/10.1117/12.860760
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Fizeau interferometer is the most commonly used interferometer for testing optical components. The aim of this work is to apply this technique to the measurement of elliptical Kirkpatrick-Baez (KB) mirrors during their fabrication process. KB mirrors are widely used at synchrotron radiation facilities around the world for x-ray focusing. Fizeau interferometer can provide accurate measurements for KB mirrors. Recently a KB mirror that can focus X-ray down to 150 nm has been fabricated in the Argonne National Laboratory.

Citation Download Citation

J. Qian, L. Assoufid, C. Liu, B. Shi, and W. Liu "Surface profile measurement of KB mirrors using Fizeau laser interferometer", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010K (27 August 2010); https://doi.org/10.1117/12.860760

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