Coherence effects in Makyoh topography

Ferenc Riesz

doi:10.1117/12.888968

27 May 2011 Coherence effects in Makyoh topography

Ferenc Riesz

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80822I (2011) https://doi.org/10.1117/12.888968
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.

Citation Download Citation

Ferenc Riesz "Coherence effects in Makyoh topography", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822I (27 May 2011); https://doi.org/10.1117/12.888968

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KEYWORDS

Speckle

Speckle pattern

Diffraction

Semiconducting wafers

Semiconductors

Coherence (optics)

Mirrors

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