Measurement of five-degrees-of-freedom error motions for a micro high-speed spindle using an optical technique

Hiroshi Murakami

doi:10.1117/12.889228

27 May 2011 Measurement of five-degrees-of-freedom error motions for a micro high-speed spindle using an optical technique

Hiroshi Murakami

Author Affiliations +

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80822X (2011) https://doi.org/10.1117/12.889228
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

We present an optical technique to measure five-degree-of-freedom error motions of a high-speed microspindle. The measurement system consists of a rod lens, a ball lens, four divided laser beams, and multiple divided photodiodes. When the spindle rotates with its concomitant rotation errors, the rod and ball lenses, which are mounted to the chuck of the spindle, are displaced, and this displacement is measured using an optical technique. In this study, the measuring system is manufactured for trial and is experimentally evaluated. The results clarify that the measuring system has a resolution of 5 nm and can be used to evaluate micro spindle rotation errors.

Citation Download Citation

Hiroshi Murakami "Measurement of five-degrees-of-freedom error motions for a micro high-speed spindle using an optical technique", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822X (27 May 2011); https://doi.org/10.1117/12.889228

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